M. Gonidec(1),*, M. Hamedi(1), A. Nemiroski(1) , L. Rubio (1), *C. Torres (1) and G. Whitesides(1,2,3)
(1) Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138, United States
(2) Wyss Institute for Biologically Inspired Engineering, Harvard University, 60 Oxford Street, Cambridge, Massachusetts 02138, United States
(3) Kavli Institute for Bionano Science and Technology, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, United States
*firstname.lastname@example.org, Tel: +1 208 596 7220
Optical metasurfaces, period, quasiperiodic, or aperiodic patterns of nanoscale metal or dieletric features with subwavelength spacing, enable a degree of engineered control over local and scattered electromagnetic fields not possible with natural occurring materials1. These materials have the potential to become key components in sensitive chemical and biological sensors and flat optics. Current methods cannot fabricate new designs with the required feature sizes both rapidly and over moderate areas (∼mm2 – cm2) despite several strategies have been proposed.
This work describes a method for fabricating infrared metasurfaces that combines the simplicity of self-assembly with the precision of projection lithography to offer new capabilities in the rapid-prototyping of periodic and quasiperiodic metasurfaces, particularly those with feature sizes in the range of 0.4 – 10 µm. This method of “template encoded microlens projection lithography” (TEMPL) enables rapid prototyping of planar, multiscale patterns of similarly shaped structures that are defined by local projection lithography with a single microsphere acting as a lens. The use of TEMPL was explored for the fabrication of a broad range of of two-dimensional lattices with varying types of nonperiodic spatial distributions. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior.
 Lipworth, G.; Ensworth, J.; Seetharam, K.; Da, H.; Lee, J. S.; Schmalenberg, P.; Nomura, T.; Reynolds, M. S.; Smith, D. R.; Urzhumov, Y. Sci. Rep. 2014, 4, 3642.